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	hartrees
Energy at 0K	-390.499844
Energy at 298.15K
HF Energy	-390.192899
Nuclear repulsion energy	62.630335

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2256	2160	31.61
2	A₁	1031	987	282.53
3	A₁	877	839	52.97
4	E	2260	2164	148.32
5	E	2260	2164	148.32
6	E	966	925	112.95
7	E	966	925	112.95
8	E	750	718	70.07
9	E	750	718	70.07

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.504
F2	0.000	0.000	-1.110
H3	0.000	1.404	0.977
H4	-1.216	-0.702	0.977
H5	1.216	-0.702	0.977

	Si1	F2	H3	H4	H5
Si1		1.6147	1.4814	1.4814	1.4814
F2	1.6147		2.5153	2.5153	2.5153
H3	1.4814	2.5153		2.4320	2.4320
H4	1.4814	2.5153	2.4320		2.4320
H5	1.4814	2.5153	2.4320	2.4320

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.586	F2	Si1	H4	108.586
F2	Si1	H5	108.586	H3	Si1	H4	110.341
H3	Si1	H5	110.341	H4	Si1	H5	110.341

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)