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	hartrees
Energy at 0K	-390.496248
Energy at 298.15K
HF Energy	-390.192988
Nuclear repulsion energy	62.716213

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2263	2161	30.87
2	A₁	1034	988	287.11
3	A₁	885	845	55.40
4	E	2268	2166	147.22
5	E	2268	2166	147.22
6	E	972	928	114.72
7	E	972	928	114.72
8	E	754	720	71.88
9	E	754	720	71.88

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.504
F2	0.000	0.000	-1.108
H3	0.000	1.404	0.975
H4	-1.216	-0.702	0.975
H5	1.216	-0.702	0.975

	Si1	F2	H3	H4	H5
Si1		1.6119	1.4807	1.4807	1.4807
F2	1.6119		2.5117	2.5117	2.5117
H3	1.4807	2.5117		2.4315	2.4315
H4	1.4807	2.5117	2.4315		2.4315
H5	1.4807	2.5117	2.4315	2.4315

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.544	F2	Si1	H4	108.544
F2	Si1	H5	108.544	H3	Si1	H4	110.383
H3	Si1	H5	110.383	H4	Si1	H5	110.383

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)