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	hartrees
Energy at 0K	-391.228286
Energy at 298.15K
HF Energy	-391.228286
Nuclear repulsion energy	62.463571

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2274	2190	33.90	220.42	0.04	0.08
2	A₁	1032	994	269.96	17.44	0.69	0.81
3	A₁	856	825	49.44	5.88	0.50	0.66
4	E	2277	2193	154.90	69.40	0.75	0.86
4	E	2277	2193	154.95	69.40	0.75	0.86
5	E	967	931	107.73	25.92	0.75	0.86
5	E	967	931	107.76	25.94	0.75	0.86
6	E	732	705	63.82	16.26	0.75	0.86
6	E	732	705	63.83	16.27	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.507
F2	0.000	0.000	-1.115
H3	0.000	1.402	0.981
H4	-1.214	-0.701	0.981
H5	1.214	-0.701	0.981

	Si1	F2	H3	H4	H5
Si1		1.6214	1.4797	1.4797	1.4797
F2	1.6214		2.5213	2.5213	2.5213
H3	1.4797	2.5213		2.4275	2.4275
H4	1.4797	2.5213	2.4275		2.4275
H5	1.4797	2.5213	2.4275	2.4275

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.704	F2	Si1	H4	108.704
F2	Si1	H5	108.704	H3	Si1	H4	110.228
H3	Si1	H5	110.228	H4	Si1	H5	110.228

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: TPSSh/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.693
2	F	-0.426
3	H	-0.089
4	H	-0.089
5	H	-0.089

	x	y	z	Total
	0.000	0.000	1.496	1.496
CHELPG
AIM
ESP

	x	y	z
x	3.456	0.000	0.000
y	0.000	3.456	-0.000
z	0.000	-0.000	2.850

<r²>	36.113
(<r²>)^1/2	6.009

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: TPSSh/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)