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	hartrees
Energy at 0K	-585.428164
Energy at 298.15K
HF Energy	-585.036058
Nuclear repulsion energy	188.159066

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2531	2355	107.61
2	A₁	945	879	81.42
3	A₁	447	416	91.95
4	E	1144	1064	269.29
4	E	1144	1064	269.29
5	E	936	871	42.55
5	E	936	871	42.55
6	E	328	306	16.58
6	E	328	306	16.58

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.332
H2	0.000	0.000	1.786
F3	0.000	1.470	-0.238
F4	1.273	-0.735	-0.238
F5	-1.273	-0.735	-0.238

	Si1	H2	F3	F4	F5
Si1		1.4542	1.5768	1.5768	1.5768
H2	1.4542		2.5017	2.5017	2.5017
F3	1.5768	2.5017		2.5465	2.5465
F4	1.5768	2.5017	2.5465		2.5465
F5	1.5768	2.5017	2.5465	2.5465

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.185	H2	Si1	F4	111.185
H2	Si1	F5	111.185	F3	Si1	F4	107.705
F3	Si1	F5	107.705	F4	Si1	F5	107.705

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CID/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CID/3-21G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)