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	hartrees
Energy at 0K	-585.482450
Energy at 298.15K
HF Energy	-585.035711
Nuclear repulsion energy	187.511848

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2515	2384	113.61	58.72	0.18	0.31
2	A₁	931	883	72.00	4.19	0.00	0.00
3	A₁	441	418	82.19	1.10	0.75	0.85
4	E	1136	1077	256.66	0.63	0.75	0.86
4	E	1136	1077	256.66	0.63	0.75	0.86
5	E	932	883	39.03	10.76	0.75	0.86
5	E	932	883	39.03	10.76	0.75	0.86
6	E	325	308	14.96	0.72	0.75	0.86
6	E	325	308	14.96	0.72	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.331
H2	0.000	0.000	1.787
F3	0.000	1.476	-0.238
F4	1.278	-0.738	-0.238
F5	-1.278	-0.738	-0.238

	Si1	H2	F3	F4	F5
Si1		1.4563	1.5821	1.5821	1.5821
H2	1.4563		2.5062	2.5062	2.5062
F3	1.5821	2.5062		2.5569	2.5569
F4	1.5821	2.5062	2.5569		2.5569
F5	1.5821	2.5062	2.5569	2.5569

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.079	H2	Si1	F4	111.079
H2	Si1	F5	111.079	F3	Si1	F4	107.816
F3	Si1	F5	107.816	F4	Si1	F5	107.816

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP2=FULL/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP2=FULL/3-21G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)