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	hartrees
Energy at 0K	-388.403594
Energy at 298.15K
HF Energy	-388.193064
Nuclear repulsion energy	62.912107

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2379	2256	42.21	154.26	0.04	0.07
2	A₁	1132	1073	314.20	15.95	0.62	0.76
3	A₁	967	917	9.99	7.04	0.51	0.67
4	E	2379	2256	177.85	45.97	0.75	0.86
4	E	2379	2256	177.85	45.97	0.75	0.86
5	E	983	932	127.13	26.00	0.75	0.86
5	E	983	932	127.13	26.00	0.75	0.86
6	E	805	763	88.23	9.71	0.75	0.86
6	E	805	763	88.23	9.71	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.498
F2	0.000	0.000	-1.107
H3	0.000	1.392	0.994
H4	-1.205	-0.696	0.994
H5	1.205	-0.696	0.994

	Si1	F2	H3	H4	H5
Si1		1.6051	1.4774	1.4774	1.4774
F2	1.6051		2.5200	2.5200	2.5200
H3	1.4774	2.5200		2.4106	2.4106
H4	1.4774	2.5200	2.4106		2.4106
H5	1.4774	2.5200	2.4106	2.4106

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.605	F2	Si1	H4	109.605
F2	Si1	H5	109.605	H3	Si1	H4	109.337
H3	Si1	H5	109.337	H4	Si1	H5	109.337

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: MP2=FULL/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: MP2=FULL/3-21G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)