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	hartrees
Energy at 0K	-388.960576
Energy at 298.15K
HF Energy	-388.890463
Nuclear repulsion energy	62.911233

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2342	2342	40.74	157.66	0.04	0.07
2	A₁	1113	1113	283.17	15.08	0.59	0.75
3	A₁	951	951	8.25	7.21	0.51	0.68
4	E	2342	2342	175.38	47.80	0.75	0.86
4	E	2342	2342	175.37	47.81	0.75	0.86
5	E	960	960	115.73	24.46	0.75	0.86
5	E	960	960	115.72	24.47	0.75	0.86
6	E	790	790	79.04	9.60	0.75	0.86
6	E	789	789	79.04	9.60	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.498
F2	0.000	0.000	-1.106
H3	0.000	1.393	0.995
H4	-1.206	-0.696	0.995
H5	1.206	-0.696	0.995

	Si1	F2	H3	H4	H5
Si1		1.6045	1.4788	1.4788	1.4788
F2	1.6045		2.5207	2.5207	2.5207
H3	1.4788	2.5207		2.4127	2.4127
H4	1.4788	2.5207	2.4127		2.4127
H5	1.4788	2.5207	2.4127	2.4127

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.614	F2	Si1	H4	109.614
F2	Si1	H5	109.614	H3	Si1	H4	109.329
H3	Si1	H5	109.329	H4	Si1	H5	109.329

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B2PLYP=FULL/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B2PLYP=FULL/3-21G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)