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	hartrees
Energy at 0K	-389.134335
Energy at 298.15K
HF Energy	-389.134335
Nuclear repulsion energy	62.346057

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2236	2236	44.01	164.95	0.03	0.07
2	A₁	1069	1069	238.50	15.49	0.58	0.74
3	A₁	899	899	10.81	7.01	0.48	0.65
4	E	2238	2238	184.86	50.91	0.75	0.86
4	E	2238	2238	184.93	50.89	0.75	0.86
5	E	916	916	97.01	24.23	0.75	0.86
5	E	916	916	97.03	24.24	0.75	0.86
6	E	763	763	67.38	9.66	0.75	0.86
6	E	763	763	67.40	9.66	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.502
F2	0.000	0.000	-1.117
H3	0.000	1.404	1.008
H4	-1.216	-0.702	1.008
H5	1.216	-0.702	1.008

	Si1	F2	H3	H4	H5
Si1		1.6186	1.4926	1.4926	1.4926
F2	1.6186		2.5467	2.5467	2.5467
H3	1.4926	2.5467		2.4323	2.4323
H4	1.4926	2.5467	2.4323		2.4323
H5	1.4926	2.5467	2.4323	2.4323

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.809	F2	Si1	H4	109.809
F2	Si1	H5	109.809	H3	Si1	H4	109.132
H3	Si1	H5	109.132	H4	Si1	H5	109.132

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B97D3/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.581
2	F	-0.292
3	H	-0.096
4	H	-0.096
5	H	-0.096

	x	y	z	Total
	0.000	0.000	0.964	0.964
CHELPG
AIM
ESP

	x	y	z
x	2.987	0.000	0.000
y	0.000	2.987	-0.000
z	0.000	-0.000	2.683

<r²>	36.204
(<r²>)^1/2	6.017

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B97D3/3-21G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)