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	hartrees
Energy at 0K	-391.073658
Energy at 298.15K
HF Energy	-391.073658
Nuclear repulsion energy	59.560521

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2117	2101	46.75	221.00	0.04	0.07
2	A₁	969	962	181.35	21.49	0.64	0.78
3	A₁	760	754	22.98	7.54	0.33	0.50
4	E	2142	2126	185.27	73.88	0.75	0.86
4	E	2142	2126	185.29	73.89	0.75	0.86
5	E	875	868	77.28	34.12	0.75	0.86
5	E	875	868	77.28	34.11	0.75	0.86
6	E	678	673	47.76	16.77	0.75	0.86
6	E	678	673	47.76	16.76	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.539
F2	0.000	0.000	-1.181
H3	0.000	1.428	1.027
H4	-1.237	-0.714	1.027
H5	1.237	-0.714	1.027

	Si1	F2	H3	H4	H5
Si1		1.7201	1.5096	1.5096	1.5096
F2	1.7201		2.6300	2.6300	2.6300
H3	1.5096	2.6300		2.4742	2.4742
H4	1.5096	2.6300	2.4742		2.4742
H5	1.5096	2.6300	2.4742	2.4742

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.868	F2	Si1	H4	108.868
F2	Si1	H5	108.868	H3	Si1	H4	110.068
H3	Si1	H5	110.068	H4	Si1	H5	110.068

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: BLYP/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.738
2	F	-0.420
3	H	-0.106
4	H	-0.106
5	H	-0.106

	x	y	z	Total
	0.000	0.000	2.091	2.091
CHELPG
AIM
ESP

<r²>	38.719
(<r²>)^1/2	6.222

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: BLYP/6-31G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)