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	hartrees
Energy at 0K	-390.260512
Energy at 298.15K
HF Energy	-390.060198
Nuclear repulsion energy	59.804763

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2156	2078	40.82
2	A₁	986	950	248.75
3	A₁	792	763	23.92
4	E	2175	2096	168.57
5	E	2175	2096	168.57
6	E	912	879	105.38
7	E	912	879	105.38
8	E	698	673	63.27
9	E	698	673	63.27

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.538
F2	0.000	0.000	-1.174
H3	0.000	1.432	1.011
H4	-1.240	-0.716	1.011
H5	1.240	-0.716	1.011

	Si1	F2	H3	H4	H5
Si1		1.7114	1.5084	1.5084	1.5084
F2	1.7114		2.6121	2.6121	2.6121
H3	1.5084	2.6121		2.4809	2.4809
H4	1.5084	2.6121	2.4809		2.4809
H5	1.5084	2.6121	2.4809	2.4809

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.275	F2	Si1	H4	108.275
F2	Si1	H5	108.275	H3	Si1	H4	110.641
H3	Si1	H5	110.641	H4	Si1	H5	110.641

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/6-31G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)