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	hartrees
Energy at 0K	-589.107058
Energy at 298.15K
HF Energy	-588.182052
Nuclear repulsion energy	187.249469

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2388	2308
2	A₁	846	818
3	A₁	414	400
4	E	990	957
4	E	990	957
5	E	848	820
5	E	848	820
6	E	296	286
6	E	296	286

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.326
H2	0.000	0.000	1.784
F3	0.000	1.481	-0.235
F4	1.282	-0.740	-0.235
F5	-1.282	-0.740	-0.235

	Si1	H2	F3	F4	F5
Si1		1.4581	1.5835	1.5835	1.5835
H2	1.4581		2.5042	2.5042	2.5042
F3	1.5835	2.5042		2.5646	2.5646
F4	1.5835	2.5042	2.5646		2.5646
F5	1.5835	2.5042	2.5646	2.5646

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.765	H2	Si1	F4	110.765
H2	Si1	F5	110.765	F3	Si1	F4	108.147
F3	Si1	F5	108.147	F4	Si1	F5	108.147

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: QCISD(T)/aug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: QCISD(T)/aug-cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)