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	hartrees
Energy at 0K	-390.505737
Energy at 298.15K
HF Energy	-390.192803
Nuclear repulsion energy	62.566119

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2245	2162
2	A₁	1028	990
3	A₁	872	840
4	E	2251	2167
5	E	2251	2167
6	E	961	926
7	E	961	925
8	E	747	719
9	E	747	719

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.112
H3	0.000	1.405	0.979
H4	-1.217	-0.702	0.979
H5	1.217	-0.702	0.979

	Si1	F2	H3	H4	H5
Si1		1.6163	1.4827	1.4827	1.4827
F2	1.6163		2.5185	2.5185	2.5185
H3	1.4827	2.5185		2.4335	2.4335
H4	1.4827	2.5185	2.4335		2.4335
H5	1.4827	2.5185	2.4335	2.4335

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.640	F2	Si1	H4	108.640
F2	Si1	H5	108.640	H3	Si1	H4	110.290
H3	Si1	H5	110.290	H4	Si1	H5	110.290

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD(T)/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD(T)/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)