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	hartrees
Energy at 0K	-588.622776
Energy at 298.15K
HF Energy	-588.017028
Nuclear repulsion energy	186.430512

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2427	2291	89.78
2	A₁	870	822	81.15
3	A₁	427	403	78.71
4	E	1041	983	271.03
4	E	1041	983	271.03
5	E	875	826	24.74
5	E	875	826	24.74
6	E	305	288	14.26
6	E	305	288	14.26

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.793
F3	0.000	1.487	-0.236
F4	1.288	-0.744	-0.236
F5	-1.288	-0.744	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4657	1.5904	1.5904	1.5904
H2	1.4657		2.5158	2.5158	2.5158
F3	1.5904	2.5158		2.5759	2.5759
F4	1.5904	2.5158	2.5759		2.5759
F5	1.5904	2.5158	2.5759	2.5759

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.752	H2	Si1	F4	110.752
H2	Si1	F5	110.752	F3	Si1	F4	108.161
F3	Si1	F5	108.161	F4	Si1	F5	108.161

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD/6-31G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)