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	hartrees
Energy at 0K	-588.633059
Energy at 298.15K
HF Energy	-588.016777
Nuclear repulsion energy	186.190812

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2415	2323
2	A₁	864	831
3	A₁	424	408
4	E	1037	998
4	E	1037	998
5	E	871	838
5	E	871	838
6	E	304	292
6	E	303	292

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.795
F3	0.000	1.489	-0.236
F4	1.290	-0.745	-0.236
F5	-1.290	-0.745	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4672	1.5924	1.5924	1.5924
H2	1.4672		2.5185	2.5185	2.5185
F3	1.5924	2.5185		2.5795	2.5795
F4	1.5924	2.5185	2.5795		2.5795
F5	1.5924	2.5185	2.5795	2.5795

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.734	H2	Si1	F4	110.734
H2	Si1	F5	110.734	F3	Si1	F4	108.180
F3	Si1	F5	108.180	F4	Si1	F5	108.180

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)/6-31G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)