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	hartrees
Energy at 0K	-588.800489
Energy at 298.15K
HF Energy	-588.058129
Nuclear repulsion energy	183.071307

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2371	2283
2	A₁	810	779
3	A₁	391	376
4	E	948	913
4	E	948	913
5	E	823	792
5	E	823	792
6	E	276	266
6	E	276	266

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.340
H2	0.000	0.000	1.807
F3	0.000	1.513	-0.243
F4	1.310	-0.757	-0.243
F5	-1.310	-0.757	-0.243

	Si1	H2	F3	F4	F5
Si1		1.4669	1.6218	1.6218	1.6218
H2	1.4669		2.5485	2.5485	2.5485
F3	1.6218	2.5485		2.6206	2.6206
F4	1.6218	2.5485	2.6206		2.6206
F5	1.6218	2.5485	2.6206	2.6206

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.100	H2	Si1	F4	111.100
H2	Si1	F5	111.100	F3	Si1	F4	107.794
F3	Si1	F5	107.794	F4	Si1	F5	107.794

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)/aug-cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)/aug-cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)