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	hartrees
Energy at 0K	-390.527294
Energy at 298.15K
HF Energy	-390.176667
Nuclear repulsion energy	61.453542

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2250	2166
2	A₁	977	940
3	A₁	826	795
4	E	2263	2179
5	E	2263	2179
6	E	955	919
7	E	954	918
8	E	719	692
9	E	719	692

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.521
F2	0.000	0.000	-1.136
H3	0.000	1.417	0.974
H4	-1.227	-0.708	0.974
H5	1.227	-0.708	0.974

	Si1	F2	H3	H4	H5
Si1		1.6567	1.4877	1.4877	1.4877
F2	1.6567		2.5416	2.5416	2.5416
H3	1.4877	2.5416		2.4542	2.4542
H4	1.4877	2.5416	2.4542		2.4542
H5	1.4877	2.5416	2.4542	2.4542

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.737	F2	Si1	H4	107.737
F2	Si1	H5	107.737	H3	Si1	H4	111.149
H3	Si1	H5	111.149	H4	Si1	H5	111.149

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)/aug-cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)/aug-cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)