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	hartrees
Energy at 0K	-589.074210
Energy at 298.15K
HF Energy	-588.175217
Nuclear repulsion energy	187.558646

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2392	2332
2	A₁	856	835
3	A₁	421	410
4	E	1007	981
4	E	1006	981
5	E	850	828
5	E	850	828
6	E	302	295
6	E	302	295

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.324
H2	0.000	0.000	1.781
F3	0.000	1.479	-0.234
F4	1.281	-0.739	-0.234
F5	-1.281	-0.739	-0.234

	Si1	H2	F3	F4	F5
Si1		1.4571	1.5805	1.5805	1.5805
H2	1.4571		2.4993	2.4993	2.4993
F3	1.5805	2.4993		2.5614	2.5614
F4	1.5805	2.4993	2.5614		2.5614
F5	1.5805	2.4993	2.5614	2.5614

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.665	H2	Si1	F4	110.665
H2	Si1	F5	110.665	F3	Si1	F4	108.252
F3	Si1	F5	108.252	F4	Si1	F5	108.252

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)/cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)/cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)