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	hartrees
Energy at 0K	-588.607969
Energy at 298.15K
HF Energy	-588.016429
Nuclear repulsion energy	183.862939

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2463	2276	67.13
2	A₁	853	789	85.59
3	A₁	410	379	91.35
4	E	1014	937	264.42
4	E	1014	937	264.42
5	E	858	793	33.19
5	E	858	793	33.19
6	E	292	270	16.97
6	E	292	270	16.97

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.335
H2	0.000	0.000	1.789
F3	0.000	1.509	-0.240
F4	1.307	-0.754	-0.240
F5	-1.307	-0.754	-0.240

	Si1	H2	F3	F4	F5
Si1		1.4542	1.6144	1.6144	1.6144
H2	1.4542		2.5282	2.5282	2.5282
F3	1.6144	2.5282		2.6130	2.6130
F4	1.6144	2.5282	2.6130		2.6130
F5	1.6144	2.5282	2.6130	2.6130

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.851	H2	Si1	F4	110.851
H2	Si1	F5	110.851	F3	Si1	F4	108.057
F3	Si1	F5	108.057	F4	Si1	F5	108.057

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CID/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CID/cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)