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	hartrees
Energy at 0K	-390.476660
Energy at 298.15K
HF Energy	-390.193204
Nuclear repulsion energy	62.908705

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2314	2150	32.62
2	A₁	1055	980	301.77
3	A₁	896	832	61.20
4	E	2314	2150	158.85
5	E	2314	2150	158.85
6	E	994	924	125.26
7	E	994	924	125.26
8	E	765	711	75.96
9	E	765	711	75.96

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.502
F2	0.000	0.000	-1.105
H3	0.000	1.399	0.971
H4	-1.211	-0.699	0.971
H5	1.211	-0.699	0.971

	Si1	F2	H3	H4	H5
Si1		1.6076	1.4749	1.4749	1.4749
F2	1.6076		2.5031	2.5031	2.5031
H3	1.4749	2.5031		2.4224	2.4224
H4	1.4749	2.5031	2.4224		2.4224
H5	1.4749	2.5031	2.4224	2.4224

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.517	F2	Si1	H4	108.517
F2	Si1	H5	108.517	H3	Si1	H4	110.408
H3	Si1	H5	110.408	H4	Si1	H5	110.408

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CID/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CID/6-311G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)