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	hartrees
Energy at 0K	-389.059513
Energy at 298.15K
HF Energy	-389.059513
Nuclear repulsion energy	61.330790

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2238	2137	49.53	193.94	0.03	0.06
2	A₁	1060	1012	226.11	23.12	0.62	0.77
3	A₁	880	840	12.93	6.91	0.39	0.56
4	E	2242	2140	178.16	59.85	0.75	0.86
4	E	2242	2140	178.18	59.85	0.75	0.86
5	E	895	854	82.79	39.95	0.75	0.86
5	E	895	854	82.80	39.95	0.75	0.86
6	E	757	723	85.19	11.34	0.75	0.86
6	E	757	723	85.19	11.34	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.515
F2	0.000	0.000	-1.141
H3	0.000	1.405	1.021
H4	-1.216	-0.702	1.021
H5	1.216	-0.702	1.021

	Si1	F2	H3	H4	H5
Si1		1.6566	1.4929	1.4929	1.4929
F2	1.6566		2.5784	2.5784	2.5784
H3	1.4929	2.5784		2.4329	2.4329
H4	1.4929	2.5784	2.4329		2.4329
H5	1.4929	2.5784	2.4329	2.4329

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.799	F2	Si1	H4	109.799
F2	Si1	H5	109.799	H3	Si1	H4	109.142
H3	Si1	H5	109.142	H4	Si1	H5	109.142

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: mPW1PW91/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.856
2	F	-0.395
3	H	-0.154
4	H	-0.154
5	H	-0.154

	x	y	z	Total
	0.000	0.000	1.494	1.494
CHELPG
AIM
ESP

<r²>	37.319
(<r²>)^1/2	6.109

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: mPW1PW91/3-21G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)