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	hartrees
Energy at 0K	-391.145193
Energy at 298.15K
HF Energy	-391.145193
Nuclear repulsion energy	62.734879

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2276	2166	40.70	189.05	0.04	0.07
2	A₁	1036	986	251.55	14.08	0.61	0.76
3	A₁	896	853	29.26	6.59	0.46	0.63
4	E	2281	2170	187.26	57.40	0.75	0.86
4	E	2281	2170	187.28	57.40	0.75	0.86
5	E	956	910	98.87	22.42	0.75	0.86
5	E	956	910	98.89	22.43	0.75	0.86
6	E	740	704	59.88	10.55	0.75	0.86
6	E	740	704	59.88	10.55	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.108
H3	0.000	1.402	0.987
H4	-1.214	-0.701	0.987
H5	1.214	-0.701	0.987

	Si1	F2	H3	H4	H5
Si1		1.6093	1.4836	1.4836	1.4836
F2	1.6093		2.5210	2.5210	2.5210
H3	1.4836	2.5210		2.4277	2.4277
H4	1.4836	2.5210	2.4277		2.4277
H5	1.4836	2.5210	2.4277	2.4277

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.128	F2	Si1	H4	109.128
F2	Si1	H5	109.128	H3	Si1	H4	109.812
H3	Si1	H5	109.812	H4	Si1	H5	109.812

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: mPW1PW91/6-31G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.734
2	F	-0.397
3	H	-0.113
4	H	-0.113
5	H	-0.113

	x	y	z	Total
	0.000	0.000	1.300	1.300
CHELPG
AIM
ESP

<r²>	35.699
(<r²>)^1/2	5.975

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: mPW1PW91/6-31G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)