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	hartrees
Energy at 0K	-388.389415
Energy at 298.15K
HF Energy	-388.193042
Nuclear repulsion energy	62.893402

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2379	2263	42.47	154.07	0.04	0.07
2	A₁	1131	1076	314.39	15.97	0.62	0.76
3	A₁	965	918	10.51	6.96	0.50	0.67
4	E	2378	2263	178.57	45.91	0.75	0.86
4	E	2378	2263	178.57	45.91	0.75	0.86
5	E	983	935	127.32	25.96	0.75	0.86
5	E	983	935	127.32	25.96	0.75	0.86
6	E	805	766	88.31	9.68	0.75	0.86
6	E	805	766	88.31	9.68	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.499
F2	0.000	0.000	-1.107
H3	0.000	1.392	0.995
H4	-1.206	-0.696	0.995
H5	1.206	-0.696	0.995

	Si1	F2	H3	H4	H5
Si1		1.6055	1.4779	1.4779	1.4779
F2	1.6055		2.5209	2.5209	2.5209
H3	1.4779	2.5209		2.4114	2.4114
H4	1.4779	2.5209	2.4114		2.4114
H5	1.4779	2.5209	2.4114	2.4114

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.610	F2	Si1	H4	109.610
F2	Si1	H5	109.610	H3	Si1	H4	109.332
H3	Si1	H5	109.332	H4	Si1	H5	109.332

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: MP2/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: MP2/3-21G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)