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	hartrees
Energy at 0K	-588.637167
Energy at 298.15K
HF Energy	-588.016482
Nuclear repulsion energy	185.906235

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2422	2312
2	A₁	856	818
3	A₁	422	403
4	E	1032	986
4	E	1032	986
5	E	870	831
5	E	870	831
6	E	302	288
6	E	302	288

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.794
F3	0.000	1.492	-0.236
F4	1.292	-0.746	-0.236
F5	-1.292	-0.746	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4669	1.5949	1.5949	1.5949
H2	1.4669		2.5197	2.5197	2.5197
F3	1.5949	2.5197		2.5841	2.5841
F4	1.5949	2.5197	2.5841		2.5841
F5	1.5949	2.5197	2.5841	2.5841

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.698	H2	Si1	F4	110.698
H2	Si1	F5	110.698	F3	Si1	F4	108.217
F3	Si1	F5	108.217	F4	Si1	F5	108.217

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP4/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP4/6-31G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)