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	hartrees
Energy at 0K	-390.423668
Energy at 298.15K
HF Energy	-390.147551
Nuclear repulsion energy	62.385408

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2299	2195
2	A₁	1047	999
3	A₁	889	849
4	E	2310	2206
5	E	2310	2206
6	E	973	929
7	E	972	928
8	E	751	717
9	E	751	717

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.116
H3	0.000	1.406	0.989
H4	-1.217	-0.703	0.989
H5	1.217	-0.703	0.989

	Si1	F2	H3	H4	H5
Si1		1.6208	1.4867	1.4867	1.4867
F2	1.6208		2.5310	2.5310	2.5310
H3	1.4867	2.5310		2.4348	2.4348
H4	1.4867	2.5310	2.4348		2.4348
H5	1.4867	2.5310	2.4348	2.4348

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.996	F2	Si1	H4	108.996
F2	Si1	H5	108.996	H3	Si1	H4	109.942
H3	Si1	H5	109.942	H4	Si1	H5	109.942

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: MP4/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: MP4/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)