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	hartrees
Energy at 0K	-390.535658
Energy at 298.15K
HF Energy	-390.200321
Nuclear repulsion energy	62.831378

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2328	2221	34.08
2	A₁	1055	1007	295.95
3	A₁	885	844	60.50
4	E	2330	2223	160.27
5	E	2330	2223	160.27
6	E	995	949	129.35
7	E	995	949	129.35
8	E	761	726	76.49
9	E	761	726	76.49

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.504
F2	0.000	0.000	-1.108
H3	0.000	1.394	0.974
H4	-1.207	-0.697	0.974
H5	1.207	-0.697	0.974

	Si1	F2	H3	H4	H5
Si1		1.6118	1.4713	1.4713	1.4713
F2	1.6118		2.5060	2.5060	2.5060
H3	1.4713	2.5060		2.4145	2.4145
H4	1.4713	2.5060	2.4145		2.4145
H5	1.4713	2.5060	2.4145	2.4145

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.657	F2	Si1	H4	108.657
F2	Si1	H5	108.657	H3	Si1	H4	110.273
H3	Si1	H5	110.273	H4	Si1	H5	110.273

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)