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	hartrees
Energy at 0K	-588.281116
Energy at 298.15K
HF Energy	-587.847623
Nuclear repulsion energy	177.946249

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2316	2232	67.97
2	A₁	774	746	70.04
3	A₁	375	361	105.01
4	E	948	914	221.71
5	E	810	780	23.78
4	E	948	914	221.71
5	E	810	780	23.78
6	E	262	252	21.24
6	E	262	252	21.24

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.360
H2	0.000	0.000	1.842
F3	0.000	1.554	-0.255
F4	1.346	-0.777	-0.255
F5	-1.346	-0.777	-0.255

	Si1	H2	F3	F4	F5
Si1		1.4820	1.6711	1.6711	1.6711
H2	1.4820		2.6098	2.6098	2.6098
F3	1.6711	2.6098		2.6915	2.6915
F4	1.6711	2.6098	2.6915		2.6915
F5	1.6711	2.6098	2.6915	2.6915

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.582	H2	Si1	F4	111.582
H2	Si1	F5	111.582	F3	Si1	F4	107.280
F3	Si1	F5	107.280	F4	Si1	F5	107.280

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: QCISD/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: QCISD/6-31G

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)