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	hartrees
Energy at 0K	-389.841591
Energy at 298.15K	-389.844991
Nuclear repulsion energy	62.681798

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2197	2156	36.03
2	A₁	999	980	216.08
3	A₁	890	874	8.30
4	E	2212	2170	159.77
4	E	2212	2170	159.76
5	E	898	881	72.92
5	E	898	881	72.92
6	E	712	699	50.57
6	E	712	699	50.57

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.498
F2	0.000	0.000	-1.107
H3	0.000	1.412	0.995
H4	-1.223	-0.706	0.995
H5	1.223	-0.706	0.995

	Si1	F2	H3	H4	H5
Si1		1.6049	1.4973	1.4973	1.4973
F2	1.6049		2.5324	2.5324	2.5324
H3	1.4973	2.5324		2.4462	2.4462
H4	1.4973	2.5324	2.4462		2.4462
H5	1.4973	2.5324	2.4462	2.4462

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.390	F2	Si1	H4	109.390
F2	Si1	H5	109.390	H3	Si1	H4	109.552
H3	Si1	H5	109.552	H4	Si1	H5	109.552

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: LSDA/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.458
2	F	-0.324
3	H	-0.045
4	H	-0.045
5	H	-0.045

	x	y	z	Total
	0.000	0.000	1.175	1.175
CHELPG
AIM
ESP

	x	y	z
x	3.358	0.000	0.000
y	0.000	3.358	-0.000
z	0.000	-0.000	2.916

<r²>	0.000
(<r²>)^1/2	0.000

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: LSDA/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)