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	hartrees
Energy at 0K	-390.950381
Energy at 298.15K
HF Energy	-390.950381
Nuclear repulsion energy	61.576932

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2235	2149	26.61	239.05	0.04	0.08
2	A₁	990	952	203.21	9.38	0.65	0.79
3	A₁	856	823	32.60	5.71	0.47	0.64
4	E	2249	2162	130.34	63.49	0.75	0.86
4	E	2249	2162	130.36	63.49	0.75	0.86
5	E	935	899	83.24	19.21	0.75	0.86
5	E	935	899	83.25	19.22	0.75	0.86
6	E	714	686	53.24	13.56	0.75	0.86
6	E	714	686	53.24	13.56	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.517
F2	0.000	0.000	-1.132
H3	0.000	1.420	0.981
H4	-1.230	-0.710	0.981
H5	1.230	-0.710	0.981

	Si1	F2	H3	H4	H5
Si1		1.6489	1.4936	1.4936	1.4936
F2	1.6489		2.5454	2.5454	2.5454
H3	1.4936	2.5454		2.4590	2.4590
H4	1.4936	2.5454	2.4590		2.4590
H5	1.4936	2.5454	2.4590	2.4590

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.093	F2	Si1	H4	108.093
F2	Si1	H5	108.093	H3	Si1	H4	110.814
H3	Si1	H5	110.814	H4	Si1	H5	110.814

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: PBE1PBE/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.531
2	F	-0.344
3	H	-0.063
4	H	-0.063
5	H	-0.063

	x	y	z	Total
	0.000	0.000	1.564	1.564
CHELPG
AIM
ESP

<r²>	36.684
(<r²>)^1/2	6.057

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: PBE1PBE/cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)