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	hartrees
Energy at 0K	-391.168311
Energy at 298.15K
HF Energy	-391.168311
Nuclear repulsion energy	62.442616

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2286	2186	39.02	241.26	0.04	0.08
2	A₁	988	945	245.17	10.06	0.63	0.77
3	A₁	862	825	70.36	6.87	0.45	0.62
4	E	2297	2197	163.79	63.63	0.75	0.86
4	E	2297	2197	163.85	63.62	0.75	0.86
5	E	961	920	88.85	16.63	0.75	0.86
5	E	961	920	88.87	16.65	0.75	0.86
6	E	717	686	53.77	15.76	0.75	0.86
6	E	717	686	53.75	15.75	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.509
F2	0.000	0.000	-1.114
H3	0.000	1.406	0.968
H4	-1.217	-0.703	0.968
H5	1.217	-0.703	0.968

	Si1	F2	H3	H4	H5
Si1		1.6234	1.4785	1.4785	1.4785
F2	1.6234		2.5122	2.5122	2.5122
H3	1.4785	2.5122		2.4345	2.4345
H4	1.4785	2.5122	2.4345		2.4345
H5	1.4785	2.5122	2.4345	2.4345

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.076	F2	Si1	H4	108.076
F2	Si1	H5	108.076	H3	Si1	H4	110.829
H3	Si1	H5	110.829	H4	Si1	H5	110.829

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B1B95/6-31+G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.661
2	F	-0.377
3	H	-0.095
4	H	-0.095
5	H	-0.095

	x	y	z	Total
	0.000	0.000	1.669	1.669
CHELPG
AIM
ESP

	x	y	z
x	3.682	0.000	0.000
y	0.000	3.683	-0.000
z	0.000	-0.000	3.101

<r²>	36.134
(<r²>)^1/2	6.011

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B1B95/6-31+G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)