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	hartrees
Energy at 0K	-391.231286
Energy at 298.15K
HF Energy	-391.231286
Nuclear repulsion energy	62.891358

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2262	2165	30.25	267.07	0.04	0.07
2	A₁	983	941	197.63	3.34	0.73	0.84
3	A₁	877	840	55.68	4.68	0.40	0.57
4	E	2271	2173	139.49	57.44	0.75	0.86
4	E	2271	2173	139.58	57.43	0.75	0.86
5	E	955	914	84.08	10.73	0.75	0.86
5	E	955	914	84.11	10.72	0.75	0.86
6	E	720	689	55.33	8.99	0.75	0.86
6	E	720	689	55.32	8.96	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.503
F2	0.000	0.000	-1.104
H3	0.000	1.404	0.965
H4	-1.216	-0.702	0.965
H5	1.216	-0.702	0.965

	Si1	F2	H3	H4	H5
Si1		1.6072	1.4780	1.4780	1.4780
F2	1.6072		2.5006	2.5006	2.5006
H3	1.4780	2.5006		2.4315	2.4315
H4	1.4780	2.5006	2.4315		2.4315
H5	1.4780	2.5006	2.4315	2.4315

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.223	F2	Si1	H4	108.223
F2	Si1	H5	108.223	H3	Si1	H4	110.690
H3	Si1	H5	110.690	H4	Si1	H5	110.690

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B1B95/cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.387
2	F	-0.288
3	H	-0.033
4	H	-0.033
5	H	-0.033

	x	y	z	Total
	0.000	0.000	1.285	1.285
CHELPG
AIM
ESP

<r²>	35.740
(<r²>)^1/2	5.978

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B1B95/cc-pVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)