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	hartrees
Energy at 0K	-390.970123
Energy at 298.15K
HF Energy	-390.873661
Nuclear repulsion energy	62.309084

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2318	2205	40.03	235.62	0.04	0.08
2	A₁	1015	965	257.86	10.74	0.66	0.80
3	A₁	850	808	83.50	6.43	0.38	0.56
4	E	2328	2214	169.69	61.42	0.75	0.86
4	E	2328	2214	169.70	61.43	0.75	0.86
5	E	990	942	102.40	16.27	0.75	0.86
5	E	990	942	102.40	16.27	0.75	0.86
6	E	728	692	55.84	15.47	0.75	0.86
6	E	728	692	55.85	15.47	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.512
F2	0.000	0.000	-1.119
H3	0.000	1.401	0.969
H4	-1.213	-0.701	0.969
H5	1.213	-0.701	0.969

	Si1	F2	H3	H4	H5
Si1		1.6306	1.4738	1.4738	1.4738
F2	1.6306		2.5141	2.5141	2.5141
H3	1.4738	2.5141		2.4270	2.4270
H4	1.4738	2.5141	2.4270		2.4270
H5	1.4738	2.5141	2.4270	2.4270

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.058	F2	Si1	H4	108.058
F2	Si1	H5	108.058	H3	Si1	H4	110.847
H3	Si1	H5	110.847	H4	Si1	H5	110.847

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B2PLYP=FULL/6-31+G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B2PLYP=FULL/6-31+G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)