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	hartrees
Energy at 0K	-390.645001
Energy at 298.15K
HF Energy	-390.233354
Nuclear repulsion energy	63.220044

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2285	2285	32.61
2	A₁	1010	1010	204.58
3	A₁	889	889	72.54
4	E	2287	2287	139.86
4	E	2287	2287	139.86
5	E	986	986	91.55
5	E	986	986	91.55
6	E	744	744	59.14
6	E	744	744	59.14

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.499
F2	0.000	0.000	-1.098
H3	0.000	1.399	0.963
H4	-1.212	-0.700	0.963
H5	1.212	-0.700	0.963

	Si1	F2	H3	H4	H5
Si1		1.5970	1.4739	1.4739	1.4739
F2	1.5970		2.4909	2.4909	2.4909
H3	1.4739	2.4909		2.4233	2.4233
H4	1.4739	2.4909	2.4233		2.4233
H5	1.4739	2.4909	2.4233	2.4233

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.340	F2	Si1	H4	108.340
F2	Si1	H5	108.340	H3	Si1	H4	110.579
H3	Si1	H5	110.579	H4	Si1	H5	110.579

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/aug-cc-pV(T+d)Z

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/aug-cc-pV(T+d)Z

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)