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	hartrees
Energy at 0K	-390.544251
Energy at 298.15K
HF Energy	-390.210549
Nuclear repulsion energy	62.536456

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2305	2186	31.81
2	A₁	1002	950	257.90
3	A₁	869	824	81.63
4	E	2314	2194	147.57
5	E	2314	2194	147.57
6	E	979	928	114.61
7	E	979	928	114.61
8	E	732	694	65.43
9	E	732	694	65.43

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.508
F2	0.000	0.000	-1.113
H3	0.000	1.402	0.967
H4	-1.214	-0.701	0.967
H5	1.214	-0.701	0.967

	Si1	F2	H3	H4	H5
Si1		1.6217	1.4746	1.4746	1.4746
F2	1.6217		2.5081	2.5081	2.5081
H3	1.4746	2.5081		2.4277	2.4277
H4	1.4746	2.5081	2.4277		2.4277
H5	1.4746	2.5081	2.4277	2.4277

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.103	F2	Si1	H4	108.103
F2	Si1	H5	108.103	H3	Si1	H4	110.804
H3	Si1	H5	110.804	H4	Si1	H5	110.804

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/TZVP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/TZVP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)