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	hartrees
Energy at 0K	-589.076146
Energy at 298.15K
HF Energy	-588.184064
Nuclear repulsion energy	188.104079

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.325
H2	0.000	0.000	1.781
F3	0.000	1.474	-0.235
F4	1.276	-0.737	-0.235
F5	-1.276	-0.737	-0.235

	Si1	H2	F3	F4	F5
Si1		1.4556	1.5762	1.5762	1.5762
H2	1.4556		2.4965	2.4965	2.4965
F3	1.5762	2.4965		2.5522	2.5522
F4	1.5762	2.4965	2.5522		2.5522
F5	1.5762	2.4965	2.5522	2.5522

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.796	H2	Si1	F4	110.796
H2	Si1	F5	110.796	F3	Si1	F4	108.115
F3	Si1	F5	108.115	F4	Si1	F5	108.115

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCD/daug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCD/daug-cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)