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	hartrees
Energy at 0K	-585.463456
Energy at 298.15K
HF Energy	-585.035800
Nuclear repulsion energy	187.738043

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2477	2369	100.83
2	A₁	935	895	77.29
3	A₁	444	425	87.76
4	E	1135	1085	255.28
4	E	1135	1085	255.28
5	E	922	882	40.81
5	E	922	882	40.81
6	E	327	312	15.86
6	E	327	312	15.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.332
H2	0.000	0.000	1.793
F3	0.000	1.474	-0.239
F4	1.276	-0.737	-0.239
F5	-1.276	-0.737	-0.239

	Si1	H2	F3	F4	F5
Si1		1.4610	1.5801	1.5801	1.5801
H2	1.4610		2.5096	2.5096	2.5096
F3	1.5801	2.5096		2.5523	2.5523
F4	1.5801	2.5096	2.5523		2.5523
F5	1.5801	2.5096	2.5523	2.5523

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.162	H2	Si1	F4	111.162
H2	Si1	F5	111.162	F3	Si1	F4	107.729
F3	Si1	F5	107.729	F4	Si1	F5	107.729

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCD/3-21G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCD/3-21G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)