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	hartrees
Energy at 0K	-588.273627
Energy at 298.15K
HF Energy	-587.847998
Nuclear repulsion energy	178.311687

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2325	2231	66.94
2	A₁	783	751	74.90
3	A₁	379	364	110.26
4	E	956	917	229.45
5	E	816	783	25.59
4	E	956	917	229.45
5	E	816	783	25.59
6	E	265	254	22.11
6	E	265	254	22.11

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.359
H2	0.000	0.000	1.840
F3	0.000	1.551	-0.254
F4	1.343	-0.775	-0.254
F5	-1.343	-0.775	-0.254

	Si1	H2	F3	F4	F5
Si1		1.4807	1.6676	1.6676	1.6676
H2	1.4807		2.6057	2.6057	2.6057
F3	1.6676	2.6057		2.6860	2.6860
F4	1.6676	2.6057	2.6860		2.6860
F5	1.6676	2.6057	2.6860	2.6860

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.578	H2	Si1	F4	111.578
H2	Si1	F5	111.578	F3	Si1	F4	107.285
F3	Si1	F5	107.285	F4	Si1	F5	107.285

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCD/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCD/6-31G

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)