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	hartrees
Energy at 0K	-390.257611
Energy at 298.15K
HF Energy	-390.060366
Nuclear repulsion energy	59.909298

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2163	2076	39.43
2	A₁	987	947	252.79
3	A₁	802	770	25.59
4	E	2183	2095	165.86
5	E	2183	2095	165.86
6	E	916	879	104.94
7	E	916	879	104.94
8	E	701	673	65.55
9	E	701	673	65.55

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.537
F2	0.000	0.000	-1.171
H3	0.000	1.432	1.008
H4	-1.240	-0.716	1.008
H5	1.240	-0.716	1.008

	Si1	F2	H3	H4	H5
Si1		1.7076	1.5076	1.5076	1.5076
F2	1.7076		2.6075	2.6075	2.6075
H3	1.5076	2.6075		2.4802	2.4802
H4	1.5076	2.6075	2.4802		2.4802
H5	1.5076	2.6075	2.4802	2.4802

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.229	F2	Si1	H4	108.229
F2	Si1	H5	108.229	H3	Si1	H4	110.685
H3	Si1	H5	110.685	H4	Si1	H5	110.685

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/6-31G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)