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	hartrees
Energy at 0K	-588.645867
Energy at 298.15K
HF Energy	-588.032392
Nuclear repulsion energy	186.037141

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2474	2302	75.95
2	A₁	853	794	94.14
3	A₁	422	393	83.23
4	E	1002	932	314.04
5	E	865	805	21.58
4	E	1002	932	314.04
6	E	301	280	16.03
5	E	865	805	21.58
6	E	301	280	16.03

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.329
H2	0.000	0.000	1.777
F3	0.000	1.491	-0.236
F4	1.291	-0.746	-0.236
F5	-1.291	-0.746	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4483	1.5947	1.5947	1.5947
H2	1.4483		2.5058	2.5058	2.5058
F3	1.5947	2.5058		2.5826	2.5826
F4	1.5947	2.5058	2.5826		2.5826
F5	1.5947	2.5058	2.5826	2.5826

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.773	H2	Si1	F4	110.773
H2	Si1	F5	110.773	F3	Si1	F4	108.139
F3	Si1	F5	108.139	F4	Si1	F5	108.139

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3/6-31+G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3/6-31+G**

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)