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	hartrees
Energy at 0K	-588.672135
Energy at 298.15K
HF Energy	-588.016142
Nuclear repulsion energy	183.295111

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2421	2294	64.94
2	A₁	842	798	81.26
3	A₁	405	384	87.34
4	E	1004	951	251.42
4	E	1004	951	251.42
5	E	841	798	33.09
6	E	289	274	16.13
5	E	841	798	33.09
6	E	289	274	16.13

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.335
H2	0.000	0.000	1.794
F3	0.000	1.514	-0.240
F4	1.311	-0.757	-0.240
F5	-1.311	-0.757	-0.240

	Si1	H2	F3	F4	F5
Si1		1.4597	1.6191	1.6191	1.6191
H2	1.4597		2.5356	2.5356	2.5356
F3	1.6191	2.5356		2.6220	2.6220
F4	1.6191	2.5356	2.6220		2.6220
F5	1.6191	2.5356	2.6220	2.6220

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.780	H2	Si1	F4	110.780
H2	Si1	F5	110.780	F3	Si1	F4	108.132
F3	Si1	F5	108.132	F4	Si1	F5	108.132

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3/cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)