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	hartrees
Energy at 0K	-390.818288
Energy at 298.15K
HF Energy	-390.232350
Nuclear repulsion energy	63.236096

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2291	2291
2	A₁	1010	1010
3	A₁	894	894
4	E	2296	2296
5	E	2296	2296
6	E	985	985
7	E	984	984
8	E	739	739
9	E	739	739

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.499
F2	0.000	0.000	-1.098
H3	0.000	1.396	0.965
H4	-1.209	-0.698	0.965
H5	1.209	-0.698	0.965

	Si1	F2	H3	H4	H5
Si1		1.5974	1.4716	1.4716	1.4716
F2	1.5974		2.4908	2.4908	2.4908
H3	1.4716	2.4908		2.4180	2.4180
H4	1.4716	2.4908	2.4180		2.4180
H5	1.4716	2.4908	2.4180	2.4180

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.438	F2	Si1	H4	108.438
F2	Si1	H5	108.438	H3	Si1	H4	110.485
H3	Si1	H5	110.485	H4	Si1	H5	110.485

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)=FULL/Def2TZVPP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)=FULL/Def2TZVPP

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)