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	hartrees
Energy at 0K	-589.246509
Energy at 298.15K
HF Energy	-588.192849
Nuclear repulsion energy	189.457691

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2402	2402	63.01
2	A₁	873	873	82.61
3	A₁	423	423	72.48
4	E	1020	1020	260.76
4	E	1020	1020	260.76
5	E	858	858	25.13
5	E	858	858	25.13
6	E	307	307	12.91
6	E	307	307	12.91

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.768
F3	0.000	1.464	-0.232
F4	1.268	-0.732	-0.232
F5	-1.268	-0.732	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4475	1.5645	1.5645	1.5645
H2	1.4475		2.4786	2.4786	2.4786
F3	1.5645	2.4786		2.5351	2.5351
F4	1.5645	2.4786	2.5351		2.5351
F5	1.5645	2.4786	2.5351	2.5351

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.691	H2	Si1	F4	110.691
H2	Si1	F5	110.691	F3	Si1	F4	108.225
F3	Si1	F5	108.225	F4	Si1	F5	108.225

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD=FULL/aug-cc-pV(T+d)Z

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD=FULL/aug-cc-pV(T+d)Z

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)