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	hartrees
Energy at 0K	-390.781384
Energy at 298.15K
HF Energy	-390.242705
Nuclear repulsion energy	63.403501

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2344	2344
2	A₁	1004	1004
3	A₁	888	888
4	E	2332	2332
5	E	2331	2331
6	E	980	980
7	E	980	980
8	E	732	732
9	E	732	732

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.499
F2	0.000	0.000	-1.096
H3	0.000	1.388	0.959
H4	-1.202	-0.694	0.959
H5	1.202	-0.694	0.959

	Si1	F2	H3	H4	H5
Si1		1.5956	1.4626	1.4626	1.4626
F2	1.5956		2.4805	2.4805	2.4805
H3	1.4626	2.4805		2.4047	2.4047
H4	1.4626	2.4805	2.4047		2.4047
H5	1.4626	2.4805	2.4047	2.4047

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.331	F2	Si1	H4	108.331
F2	Si1	H5	108.331	H3	Si1	H4	110.587
H3	Si1	H5	110.587	H4	Si1	H5	110.587

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD(T)=FULL/aug-cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD(T)=FULL/aug-cc-pVQZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)