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	hartrees
Energy at 0K	-390.479702
Energy at 298.15K
HF Energy	-390.159250
Nuclear repulsion energy	62.305005

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2337	2337
2	A₁	1023	1023
3	A₁	859	859
4	E	2349	2349
5	E	2349	2349
6	E	1000	1000
7	E	1000	1000
8	E	730	730
9	E	730	730

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.513
F2	0.000	0.000	-1.120
H3	0.000	1.398	0.967
H4	-1.211	-0.699	0.967
H5	1.211	-0.699	0.967

	Si1	F2	H3	H4	H5
Si1		1.6324	1.4703	1.4703	1.4703
F2	1.6324		2.5118	2.5118	2.5118
H3	1.4703	2.5118		2.4220	2.4220
H4	1.4703	2.5118	2.4220		2.4220
H5	1.4703	2.5118	2.4220	2.4220

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.992	F2	Si1	H4	107.992
F2	Si1	H5	107.992	H3	Si1	H4	110.909
H3	Si1	H5	110.909	H4	Si1	H5	110.909

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD(T)=FULL/6-31+G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD(T)=FULL/6-31+G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)