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	hartrees
Energy at 0K	-588.938894
Energy at 298.15K
HF Energy	-588.150544
Nuclear repulsion energy	187.026661

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2436	2275	66.76
2	A₁	857	800	96.28
3	A₁	413	386	87.82
4	E	999	932	290.57
4	E	999	932	290.57
5	E	840	784	42.03
5	E	840	784	42.03
6	E	291	272	15.72
6	E	291	272	15.72

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.329
H2	0.000	0.000	1.779
F3	0.000	1.482	-0.237
F4	1.283	-0.741	-0.237
F5	-1.283	-0.741	-0.237

	Si1	H2	F3	F4	F5
Si1		1.4500	1.5862	1.5862	1.5862
H2	1.4500		2.5020	2.5020	2.5020
F3	1.5862	2.5020		2.5666	2.5666
F4	1.5862	2.5020	2.5666		2.5666
F5	1.5862	2.5020	2.5666	2.5666

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.901	H2	Si1	F4	110.901
H2	Si1	F5	110.901	F3	Si1	F4	108.004
F3	Si1	F5	108.004	F4	Si1	F5	108.004

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3=FULL/TZVP

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3=FULL/TZVP

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)