Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Geometry for Si(CH₃)₄ (tetramethylsilane) ¹A₁ TD

HSEh1PBE/cc-pVTZ

For information on specific bond angles or dihedrals see the geometry comparison page in section Comparisons > Geometry > Bonds, angles.