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18 10 26 16 25

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Species Name Experimental Angle Calculated Angle Difference
Si2H6 disilane 109.5 108.5 1.0
SiH2Cl2 dichlorosilane 111.3 112.8 -1.5
SiH4 Silane 109.5 109.5 -0.0
SiH3F monofluorosilane 110.6 110.6 0.0
SiH3 Silyl radical 110.5 111.1 -0.6
SiH2F2 difluorosilane 114.6 114.6 0.0
SiH2 silicon dihydride 92.0 91.3 0.7
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