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18 10 26 16 25

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Species Name Experimental Angle Calculated Angle Difference
CH3SiH3 methyl silane 108.4 108.2 0.2
SiH2(CH3)2 dimethylsilane 107.8 107.3 0.5
Si2H6 disilane 109.5 108.4 1.1
SiH2Cl2 dichlorosilane 111.3 113.2 -1.9
SiH4 Silane 109.5 109.5 -0.0
SiH3Cl chlorosilane 110.6 110.6 0.0
SiH3F monofluorosilane 110.6 110.0 0.6
SiH3 Silyl radical 110.5 110.8 -0.3
SiH3+ Silyl cation 120.0 120.0 -0.0
SiH2F2 difluorosilane 114.6 114.4 0.2
SiH2 silicon dihydride 92.0 91.0 1.0
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