CCCBDB listing of experimental data page 2

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Property	Value	units	Reference
Hfg(298.15K)	-1200.81	kJ mol^-1	webbook
Hfg(0K)		kJ mol^-1	webbook
Entropy (298.15K)	277.26	J K^-1 mol^-1	webbook
Heat Capacity (298.15K)	63.44	J K^-1 mol^-1	webbook

Mode Number	Symmetry	Frequency			Intensity			Comment	Description
Mode Number	Symmetry	Fundamental(cm^-1)	Harmonic(cm^-1)	Reference	(km mol^-1)	unc.	Reference	Comment	Description
1	A₁	2316		webbook
2	A₁	858
3	A₁	425
4	E	998
5	E	844
6	E	306

Description	Value	unc.	Connectivity				Reference	Comment
Description	Value	unc.	Atom 1	Atom 2	Atom 3	Atom 4	Reference	Comment
rSiH	1.449	0.000	1	2			1999Dem/Mar:1053-1067
rSiF	1.563	0.000	1	3			1999Dem/Mar:1053-1067
aHSiF	110.6884	0.0004	2	1	3		1999Dem/Mar:1053-1067
aFSiF	108.2271	0.0004	3	1	4		1999Dem/Mar:1053-1067

Atom	x (Å)	y (Å)	z (Å)
Si1	0.0000	0.0000	0.3204
H2	0.0000	0.0000	1.7691
F3	0.0000	1.4619	-0.2317
F4	1.2660	-0.7309	-0.2317
F5	-1.2660	-0.7309	-0.2317

	Si1	H2	F3	F4	F5
Si1		1.4487	1.5627	1.5627	1.5627
H2	1.4487		2.4780	2.4780	2.4780
F3	1.5627	2.4780		2.5321	2.5321
F4	1.5627	2.4780	2.5321		2.5321
F5	1.5627	2.4780	2.5321	2.5321

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.688	H2	Si1	F4	110.688
H2	Si1	F5	110.688	F3	Si1	F4	108.227
F3	Si1	F5	108.227	F4	Si1	F5	108.227

Bond Type	Count
H-Si	1
F-Si	3

Experimental data for SiHF3 (trifluorosilane)

Experimental data for SiHF₃ (trifluorosilane)